RPS部

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RPS Test Platform & Workshop

1.Perfect hard anodize technology for plasma block recoating.

2.RPS/RPSC Test Simulator Platform.

3.IntegrationTechnology Team for RPSC Repair.

4.Sanity Spare Parts Management and perfection overhaul SOP.

5.Standard Quality Verification.


Remote Plasma Source Service

1.AE/MKS RPS Repair Service.

2.RPS/RPSC Recoating Block Service.

3.RPS/RPSC Overhaul Service.

4.RPS/RPSC Repair PCB Service.

5.RPS/RPSC  Test Service.

 

Repair RPSC  Flow Chart

 

Remote Plasma Source Unit

SUPPLYTYPETYPE   NAMETYPE   NUMBERUSER   VENDOR
AE6KWRapid-F3151801-004AMT/AKT
AE8KWXstream3151806-202fAMT/AKT
MKS2Lastron WFI20620-1(5KW)AMT/AKT
MKS2Lastron WAX7635(3KW)AMT
MKS3Lastron I7670/1/21AMT/NVLS
MKS6Lastron EFI80130AMT
MKS6Lastron EXFI80131AKT
MKS8Lastron EXFI80132AKT
MKS15Lastron-hfFI80146AKT
MKS15Lastron-hf-sAX7645NVLS
MKS22Lastron-hf+FI7635AKT
MKS30Lastron-hf++AX7665AKT

 



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